SEE BELOW FOR OUR WEEKLY Tool SPECIAL
Updated 28-jan-2011
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29 Tools in one bundle |
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| FF # | Module | Type | Model | Manufacture | Vintage | Fab ID | S/N |
| 74 | Etch | Nitride ETCHER | TE-8401 | TEL | 2000 | w882 | K84839 |
| 75 | Etch | Nitride ETCHER | TE-8401 | TEL | 2000 | W881 | K84838 |
| 76 | Etch | Nitride ETCHER | TE-8401 | TEL | 2000 | W4909 | K84849 |
| 77 | Etch | Nitride ETCHER | TE-8401 | TEL | 2002 | W880 | K84869 |
| 78 | Etch | Nitride ETCHER | TE-8401 | TEL | 2002 | w883 | K84874 |
| 79 | Etch | SILICON OXIDE ETCHER | TE-8500 | TEL | 1994 | w702 | K85159 |
| 80 | Etch | SILICON OXIDE ETCHER | TE-8500 | TEL | 1994 | w701 | K85158 |
| 81 | Etch | W ETCHBACK ETCHER | TE-8600 | TEL | 1996 | w3106 | K86552 |
| 127 | Metals | LPCVD, Wsi | MB2-730(DCS) | Varian/TEL | 2000 | W4308 | MCJ-190 |
| 192 | Metro | WAFER INSPECTION | KLA-2112 | KLA-Tencor | 1996 | W2726 | 696 |
| 193 | Metro | WAFER INSPECTION | KLA-2115 | KLA-Tencor | 1997 | W3640 | 1016 |
| 194 | Metro | WAFER INSPECTION | KLA-2115 | KLA-Tencor | 1997 | W3641 | 971 |
| 195 | Metro | WAFER INSPECTION | KLA2118 | KLA-Tencor | 2000 | W4841 | 1235 |
| 196 | Metro | WAFER INSPECTION | KLA-2131 | KLA-Tencor | 1995 | W533 | 593 |
| 197 | Metro | WAFER INSPECTION | KLA-2552 | KLA-Tencor | 1996 | C506 | 718 |
| 198 | Metro | OVERLAY MEASURE | KLA-5100 | KLA-Tencor | 1996 | W2626 | 1234 |
| 221 | Metro | SHEET,RESIST | M-GAGE300 | KLA-Tencor | 1994 | W120 | 0294-0715 |
| 158 | Metro | FIB | SMI-8800SE | SII | 1994 | TQ104 | 089P06-01 |
| 235 | RTP | RTA | LA-W815-AV2.5 | DNS | 1994 | w301 | 53710-4028 |
| 324 | Test | Spectro-photometer | HP8452A | HP | 1994 | W248 | 3104G02964 |
| 307 | Test | Prober | MP-10 | MJC | 1994 | TL002 | 5069405075 |
| 308 | Test | Prober | MP-10+SA-60A | MJC | 1994 | L06 | 5069405076 |
| 323 | Test | Hot-electron analyzer | C3230-05,MP-10 | Hamamatsu Photonics | 1994 | TF108 | 697208 |
| 309 | Test | Prober | 78S | TEL | 1995 | TL213 | 7SA2109 |
| 310 | Test | Prober | 78S | TEL | 1994 | TL212 | 7SA0101 |
| 312 | Test | Prober | 78S | TEL | 1996 | L23 | 7SA2406 |
| 272 | Test | Prober | 78S | TEL | 1996 | TL215 | 7SA2603 |
| 273 | Test | Prober | 78S | TEL | 1996 | TL216 | 7SA2602 |
| 311 | Test | Prober | 78S | TEL | 1994 | TL214 | 7S0312 |
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For more tools, configs, photos, etc, visit our 200mm tool page
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